微球动态涂敷状态实时监测光学系统的设计
Design of optical system for monitoring coating status of micro-sphere at real-time
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摘要: 介绍了一种可用于实时监测直径0.2~1.0 mm激光核聚变靶球涂敷状态的光学系统的设计,系统采用环形LED照明系统以适合特殊的照明要求,用Petzval型物镜使500 mm处的微球清晰成像于CCD像面上,CCD输出的图像电信号经图像采集卡转换成数字信号,最后该数字信号由计算机进行处理,实现了系统对靶球膜层涂敷作业的自动监控,大大提高了涂敷效率。所设计的系统轴上点最大弥散斑直径为12.6 mm,轴外最大弥散斑直径为15.8 mm,整个视场的像质比较均匀,分辨率较高,对于波长522 nm的光线,场曲和畸变分别小于15 mm和0.012%,像质优良。Abstract: An optical system was designed. It can be applied in monitoring the real-time bouncing status of ICF target micro-sphere with 0.2~1.0 mm in diameter. A ring Light Emitting Diode (LED) for specific illumination was designed, and through the Petzval objective system, the micro-sphere was imaged onto the CCD with details resolution. Video detection system by personal computer captured and disposed every video image. Monitoring the real-time status of micro-sphere was realized and the coating efficiency improved greatly. The optical system had very good image quality, with the maximum spot diameter on-axis and off-axis of 12.6 μm and 15.8 μm, respectively. The fields were uniform and had high resolution. Particularly, the field curvature less than 15 μm and the distortion less than 0.012% f
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Key words:
- icf target micro-sphere /
- optical system /
- ring led /
- petzval objective /
- real-time monitor /
- mtf
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