微加工薄膜变形镜本征模分析
Eigen mode of micromachined membrane deformable mirror
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摘要: 介绍了变形镜本征模的构造过程及其特点，分析了从荷兰OKO公司购买的37单元微加工薄膜变形镜的本征模，并用前65阶Zernike多项式分析微加工薄膜变形镜的37阶本征模的特性。搭建了以微加工薄膜变形镜作为波前校正器、变形镜本征模为波前复原控制算法以及高分辨率Shack-Hartmann波前传感器为波前探测器的自适应光学实验系统。实验结果表明：变形镜本征模可以实现模式筛选，也可作为自适应光学系统的波前复原算法。Abstract: The construction process and characteristics of the deformable mirror eigen mode are presented. The eigen modes of 37-channel micro-machined membrane deformable mirror from OKO Ltd are listed and fitted with the former 65 order Zernike polynomial. An experiment setup system is established based on micromachined membrane deformable mirror as wavefront corrector, Shack-Hartmann wavefront sensor as wavefront detector and the eigen modes as wavefront control algorithm. The experiment results demonstrate that the eigen modes can both act as basic function which provides the possibility of keeping some modes while compensating other modes and the control algorithm in the adaptive optics system especially in the case of micromachined membrane deformable mirror as wavefront corrector.
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