连续激光辐照下二氧化钒薄膜热致相变实验研究
Experimental study on heating-induced phase transition of vanadium dioxide thin films irradiated by CW laser
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摘要: 介绍了VO2薄膜的相变原理，用磁控离子溅射法制备了VO2薄膜，并进行了X射线衍射和不同温度下的光谱透过率测量。在1.319 μm 连续波激光辐照下，实时测量了VO2薄膜的温度变化，以及由于温度变化引起相变后对激光透过率的变化。结果表明，入射到薄膜表面的平均功率为8.9 W、光斑直径2 mm时，激光出光480 ms后，VO2的温度从室温上升到约100 ℃，薄膜发生了相变，其对1.319 μm激光的透过率从相变前的48％降为相变后的28％。Abstract: The phase transition principle of VO2 thin films is introduced in this paper. The X-ray diffraction pattern and spectral transmission at different temperature of vanadium dioxide thin films deposited on glass by RF magnetron sputtering were measured. Temperature and transmission change caused by heating-induced phase transition of the vanadium dioxide thin films were measured on real time under the irradiation of a 1.319 μm continuous wave laser beam with an average power density of 283 W/cm2 and a spot diameter of 2 mm. The experimental results indicate that after 480 ms laser irradiation, the temperature of vanadium dioxide thin film is raised from room temperature to about 100 ℃, phase transition occurs and transmittance decreases from 48% before the phase transition to 28% after the
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Key words:
- vo2 thin film /
- heating-induced phase transition /
- optical limiting /
- laser protection
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