重频XeF(C-A)蓝绿激光器中XeF2浓度的监测与控制
Control and measurement of XeF2 concentration in chamber of XeF(C-A) laser operating on repetition mode
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摘要: 介绍了采用光谱吸收法实时监测重复频率XeF(C-A)蓝绿激光器中XeF2气体浓度的原理和控制XeF2气体浓度的方法；给出了监测窗中XeF2气体浓度与激光器气室中的XeF2气体浓度之间的关系，获得了在不同主/载气路气流量条件下激光器气室中XeF2气体浓度值，通过调节主/载气路的气流量实现了对激光器腔室内XeF2气体浓度的控制，保证了XeF(C-A)蓝绿激光器1 Hz重频运行。
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关键词:
- 浓度监控 /
- 光谱吸收 /
- XeF(C-A)蓝绿激光器 /
- XeF2
Abstract: The principle of real time measurement XeF2 concentration by absorbed spectrum and XeF2 concentration control means in laser chamber are introduced. Relation of XeF2 concentration between laser chamber and measure cell is given. XeF2 concentration could be controlled by adjusting the temperature of the XeF2 generator and the flow velocity in the main and carrier gas-passages. XeF2 concentrations under different mixed gas flow are obtained. -
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