Hartmann-Shack传感器组装误差分析
Assembly error of Hartmann-Shack sensor
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摘要: 分析了Hartmann-Shack传感器组装误差的种类,导出了旋转误差和倾斜误差的校正矩阵,在进行波前重构时乘以校正矩阵可以校正对应的组装误差。分析了两种由于组装误差导致的波前重构的相对误差的公式,并以含52个子孔径的圆形Hartmann-Shack传感器为例进行了数值模拟。研究结果表明:若不对两种组装误差进行校正,将会限制Hartmann-Shack传感器测量精度的进一步提高。为Hartmann-Shack传感器的装配提供了理论依据。
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关键词:
- Hartmann-Shack传感器 /
- 组装误差 /
- 旋转误差 /
- 倾斜误差 /
- 相对重构误差
Abstract: When Hartmann-Shack sensor was assembled with lens array and CCD, the assembly error was produced inevitably. It would greatly reduce the precision of the wavefront measurement. Two types of assembly error of Hartmann-Shack sensor were analyzed and emendation matrix was obtained in this paper. The assembly error would be eliminated with corresponding matrix. The relationship of the relative reconstruction error to the assemble error was obtained by using Monte-Carlo relative reconstruction error simulation technology which provides theoretical basis and specification for assembling of Hartmann-Shack sensor.-
Key words:
- hartmann-shack sensor /
- assembly error /
- rotation error /
- slope error /
- relative reconstruction error
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