ZrO2薄膜的改性与抗激光损伤研究
Modification and laser-damage resistance of zirconia thin films
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摘要: 采用水热合成技术，制备了ZrO2胶体，用旋涂法镀制了单层ZrO2介质膜以及添加了有机粘合剂PVP的复合ZrO2-PVP薄膜。采用X射线衍射(XRD)、椭偏仪、红外分光光度计（FTIR）、原子力显微镜（AFM）等仪器对干凝胶及薄膜进行了性能测试和表征，并用输出波长为1.064 μm、脉宽为10 ns的电光调Q激光系统产生的强激光测试其激光损伤阈值。测得ZrO2和ZrO2-PVP薄膜在300 ℃热处理60 min后的激光损伤阈值分别为24.5 J/cm2和37.8 J/cm2。研究表明：添加有机粘合剂后的复合薄膜具有平整的表面结构；有机粘合剂的添加有助于提高薄膜的折射率和激光损伤阈值，其中，ZrO2-PVP 复合薄膜的折射率可高达1.75，激光损伤阈值达到37.8 J/cm2，比ZrO2单层膜的激光损伤阈值提高50%。Abstract: ZrO2 sol was obtained by using hydrothermal synthesis. Thin ZrO2 films and ZrO2-PVP composite films were prepared with spin coating method. Both the ZrO2 films and ZrO2-PVP composite films were characterized by ellipsometer, FTIR, AFM respectively. The crystallization behavior of ZrO2 xerogels was examined by X-ray diffraction. And 1-on-1 laser-induced damage threshold tests on ZrO2 films and ZrO2-PVP composite films were carried out with a Q-switched Nd:YAG high power laser at 1 064 nm with a pulse width of 10 ns. The measured laser-induced damage threshold of ZrO2 films with heat treatment at 300 ℃ for 60 min was 24.5 J/cm2, and 37.5 J/cm2 for that of ZrO2-PVP composite films. The experimental results show that the incorporating organic binder PVP (polyvinyl pyrrolidone), without obviou
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