单甲基原位改性SiO<sub>2</sub>疏水减反膜的制备与性能研究

张磊; 徐耀; 黄进; 蒋晓东; 吕海滨; 赵松楠; 吴东; 孙予罕; 魏晓峰

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单甲基原位改性SiO₂疏水减反膜的制备与性能研究

张磊^1,2,3,
徐耀¹,
黄进²,
蒋晓东²,
吕海滨²,
赵松楠²,
吴东¹,
孙予罕¹,
魏晓峰²

1.
中国科学院山西煤炭化学研究所煤转化国家重点实验室, 太原 030001 ;
2.
中国工程物理研究院激光聚变研究中心, 四川绵阳 621 900;
3.
中国科学院研究生院, 北京 1 00049

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出版历程
- 刊出日期: 2006-10-25

Preparation and properties of methyl-situ-modified sol-gel hydrophobic anti-reflective SiO₂ coating

1.
State Key Laboratory of Coal Conversion,Shanxi Institute of Coal Chemistry,Chinese Academy of Sciences,Taiyuan 030001,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-988,Mianyang 621900,China;
3.
Graduate School of Chinese Academy of Sciences,Beijing 100049,China

摘要

摘要: 在碱性条件下通过TEOS和MTES的共水解缩聚反应制备了单甲基原位改性的SiO2溶胶，并使用提拉法在K9玻璃基片上镀制了疏水减反膜。通过透射电镜（TEM）考察了镀膜溶胶的微结构，分别使用红外光谱（FTIR）分析了薄膜的组分，用原子力显微镜（AFM）观察了薄膜的表面形貌和起伏状况，用紫外可见光谱（UV-vis）考察了薄膜的减反射性能，用接触角仪测量了薄膜对水的接触角。并使用“R-on-1”的方式测量了薄膜在Nd:YAG激光（1 064 nm，1 ns）作用下的损伤阈值。结果表明，通过共水解缩聚反应可以把甲基引入镀膜溶胶簇团中，改善了溶胶簇团的网络结构，使薄膜得到相当好的疏水性能和更好的抗激光损伤性能，同时薄膜能保持较好的减反射性能。
- 共水解缩聚 /
- TEOS /
- MTES /
- 疏水性 /
- 减反膜 /
- 激光损伤
Abstract: Methyl-situ-modified silica sols were obtained by hydrolysis and co-condensation reactions occurred in base-catalyzed system by carefully controlling the sol-gel process of Methyltriethoxysilane (MTES) and Tetraethoxysilane (TEOS). Hydrophobic- antireflective silica film was then prepared by dipping-coating technique from the modified sols. As a result, the hydrophobicity of antireflective coating was highly improved. The properties of the films were characterized with atomic force microscope (AFM)，ultraviolet-visible spectrum (UV-Vis) and contact angle analyzer measurement. An Nd:YAG laser (1 064 nm,1 ns) was used to irradiate the film by “R on 1” method and the damage thresholds were measured. In addition, comparison was carried out between organically modified coating and pure silica
- co-hydrolysis-condensation /
- mtes /
- teos /
- hydrophobicity /
- antireflective film /
- laser damage