干涉测量系统中杂散条纹影响的抑制
Effect reduction of spurious fringes in interferometric measurement system
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摘要: 为了抑制杂散条纹的影响，提出了一种简单实用的单幅三表面干涉条纹傅里叶分析法，它根据三表面干涉时各个表面干涉的条纹调制度不同，从三表面干涉图的频谱中提取测试面的频谱，从而准确地恢复测试面的面形。模拟结果证明了该方法的有效性，准确度可以达到l/1 000。实验表明：单幅三表面干涉条纹傅里叶分析法得到的面形形状与波长调谐时域傅里叶变化法和涂消光漆法得到的结果基本一致，PV值和RMS值与波长调谐时域傅里叶变化法相差分别为0.001l和0.004l，与涂消光漆法相差分别为0.042l和0.019l。通过7次单幅三表面干涉条纹傅里叶分析法测量，得到PV和RMS值的重复性分别为0.007 8l和0.002 6l。Abstract: To accurately profile transparent element with parallel surface, this article presents a new simple and useful method by using a Fourier analysis technique with single three-beam interfere pattern. The test surface’s frequency spectrum from the frequency spectrum of three-beam interfere pattern is extracted by a spatial filter according to the amplitude in the spatial carrier frequency. The test wavefront is obtained by using inverse Fourier transform method. Simulated results demonstrate the validity of the method and the accuracy which is better than l/1 000. In the experiment, by testing the parallel surface element by FFT with single three-beam interfere pattern, Fourier analysis combined with wavelength tuning and traditional phase shifting interferometry with index matching lacquers
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Key words:
- interferometry /
- spurious fringes /
- fourier analysis /
- nearly parallel optical elements
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