分层蒸镀制备聚酰亚胺自支撑膜及其特性研究
Preparation of ultra-thin freestanding polyimide films with sequential evaporation technique
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摘要: 采用分层蒸镀法，在玻璃基片上依次蒸镀二氨基二苯醚（ODA）和均苯四甲酸二酐（PMDA）两种单体，然后在空气环境中对样品进行不同温度和时间的热亚胺化处理，使二者在交界面上反应生成聚酰亚胺。经加热150 ℃ 1 h然后经350 ℃ 2 h处理的样品，在脱膜后能制备出直径1.8 cm，厚度为100 nm的聚酰亚胺自支撑薄膜。用FTIR测量了自支撑薄膜的红外光谱，特征吸收峰的分析表明薄膜已基本上完全亚胺化。用原子力显微镜分析了浮法玻璃衬底上聚酰亚胺薄膜的表面形貌，结果表明以ODA作为内层制备的膜层表面更光滑平整。Abstract: Ultra-thin freestanding polyimide(PI) films of 100 nm thickness were formed by sequential evaporation of 4,4'-diaminodiphenyl ether(ODA) and pyromellitic dianhydride(PMDA) precursor monomers followed by a thermal treatment of 150 ℃ 1 h and 350 ℃ 2 h. The chemical structures of the PI films were investigated using FTIR spectroscopy and the degree of imidization was calculated. Results show that the PI film has a fully imidization. The surface morphology of the films, compared with co-deposited PI films, was observed using AFM, the surface morphology of the PI films would be better by depositing ODA first.
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Key words:
- sequential deposition /
- monomer /
- polyimide /
- freestanding film /
- surface morphology
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