光学平台微角振动激光探测方法研究
Laser detection of micro-angle vibration of optics bench
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摘要: 设计了精密动态测角实验系统，该系统利用扩束镜正向和逆向不同的光学变换性质，将共孔径双向传输的倍增式角敏光学系统与光电精密位置传感器（PSD）相结合，并从理论上分析了高灵敏光学测角的基本原理，给出了被测角与传感器信号的关系。为消除光电噪声对探测分辨率的影响，信号处理引入了相关检测模式。通过压缩系统噪声信号的等效带宽，从频域中滤除干扰信号的频率成分，实现了从噪声中提取高分辨角度信息。Abstract: The laser angle detection system using different optical transformation characters of the beam expander in forward and converse dirction, and the angle sensitive multiply optical system of bi-directional transmission in a common aperture is combined with photoelectric precise position sensitive detector(PSD) in this system. The basic principle of high sensitive optics angle detection is analyzed, and the relation between detected angle and the signal of the position sensitive detector is given. In order to eliminate the influence of the photoelectric noise on detection resolution, the correlation detection mode is adopted in signal processing. By compressing effective band width of the system noise signal, the disturbed signal is filtered from frequency domain, and the high-resolution angl
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