抗真空有机物污染增透膜特性分析
Properties of antireflective coating with vacuum organic contamination resistant property
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摘要: 采用溶胶-凝胶法，结合氨水后处理工艺制备了抗真空有机物污染的二氧化硅增透膜。该膜峰值透光率为99.8%，在有机污染的真空系统中(10-3 Pa)保持168 h，透光率曲线变化微小，而同样条件下常规二氧化硅增透膜的峰值透光率下降至95.5%。并采用分光光度计、红外光谱、扫描探针显微镜、静滴接触角测量仪、椭偏仪等测试手段分析了薄膜的特性。Abstract: Silica antireflective coatings with vacuum organic contamination resistant property were prepared by sol-gel method along with ammonia post-treatment. The peak transmittance of such a coating was approximately 100%. Exposing the coating to a vacuum of 10-3 Pa with silicone oil for one week, the transmittance showed little change. However, the peak transmittance of the coating without ammonia post-treatment decreased from 100% to 95.5% under the same condition. The properties of the coatings were analyzed by spectrophotometry, FTIR-spectroscopy, scanning probe microscope method, contact angle measurement, and spectroscopic ellipsometry.
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