用原子力显微镜4π旋转技术测量靶丸表面粗糙度
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摘要: 原子力显微镜靶丸4π旋转装置,可以将靶丸在夹持状态下实现4π方向旋转,便于原子力显微镜对靶丸表面任一部分做扫描测量。应用该装置对各种靶丸的表面形貌进行了测量,测量结果表明,靶丸外表面粗糙度小于10nm,内表面粗糙度小于20nm。
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关键词:
- 原子力显微镜 /
- 靶丸4π旋转测量装置 /
- ICF靶参数测量
Abstract: In order to measure prec isely the roughness of capsule surface,a 4π turning device matching with AFM for microsphere is developed.The shell mounted on the 4π turning device can be rotated in any angle, and any where of the target surface can be measured. With this equipment,various capsules are investigated and discussed.
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