强激光作用下水冷硅镜沟槽参数的模拟分析
Channel parameter analysis of water-cooled silicon mirror for high-energy laser
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摘要: 采用ANSYS有限元软件详细地研究了强激光作用下水冷硅镜的沟槽结构对镜面温升和变形峰谷值的影响。结果表明：水冷硅镜的沟槽结构对镜面变形峰谷值有很大的影响。在水流量一定时，沟槽宽度越小，镜面热变形和温升越小；在水流量和沟槽宽度一定时，沟槽越浅，镜面热变形越小，沟槽深度对镜面温升影响不明显。对于水冷镜，沟槽尺寸越小效果越好。对于高功率激光器而言，水冷镜沟槽尺寸一般采用几百mm~1 mm为宜。Abstract: The influence of the channel parameters of the water-cooled Si mirror on temperature and thermal deformation was simulated using ANSYS finite element analysis. The results show that the channel parameters have significant effects on the thermal deformation. For a given flow rate of water, the temperature rise and thermal deformation decrease with the decreasing of channel width. With a constant flow rate and channel width, the thermal deformation decreases with the channel depth. However, the effect of channel depth on temperature rise is not obvious. For the water-cooled mirror, it would be better to make the channel small. For high power laser, the channel size of the water-cooled mirror is several hundred mm to 1 mm.
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