利用氟硅烷提高溶胶-凝胶SiO2增透膜的疏水性
Improving hydrophobic property of sol-gel antiveflective silica coatings by FAS
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摘要: 以正硅酸乙酯为前驱体,氨水为催化剂,采用溶胶凝胶法制备了二氧化硅增透膜;通过自组装技术,用氟硅烷对膜层进行表面修饰,制得了疏水增透膜,克服了常规增透膜亲水的缺点。采用红外光谱、分光光度计、扫描探针显微镜和静滴接触角测量仪等测试手段分析了薄膜的特性。结果表明:疏水增透膜的峰值透光率为99.7%,疏水角为110°;氟硅烷自组装改性不影响二氧化硅增透膜的光学性能。Abstract: Using TEOS as precursor, ammonia as catalyst, silica antireflective coating was prepared by sol-gel process. To obtain hydrophobic properties, the silica coatings were surface-modified with fluoroal kylsilane(FAS) by self-assembly technique. FTIR-spectroscopy, UV-vis spectroscopy, scanning probe microscopy and contact angle measurement were used to measure the properties of the silica coatings. The results show that the peak transmittance of the hydrophobic coating is 99.7%, and the water contact angle of the hydrophobic coating is 110°. The FAS surface modification does not influence the optical properties of the coating, but improve its hydrophobicity remarkably.
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Key words:
- sol-gel /
- silica /
- hydrophobic antireflective coating /
- self-assembly /
- fluoroal kylsilae
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