溶胶-凝胶法MgF<sub>2</sub>紫外增透膜的制备和性能研究

崔延霞; 张磊; 徐耀; 吴东; 孙予罕; 吕海兵; 王海军; 蒋晓东

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溶胶-凝胶法MgF₂紫外增透膜的制备和性能研究

崔延霞^1,2,
张磊^1,2,3,
徐耀¹,
吴东¹,
孙予罕¹,
吕海兵³,
王海军³,
蒋晓东³

1.
中国科学院山西煤炭化学研究所煤转化国家重点实验室, 太原 030001 ;
2.
中国科学院研究生院, 北京 1 00049;
3.
中国工程物理研究院激光聚变研究中心, 四川绵阳 621 900

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出版历程
- 刊出日期: 2008-03-15

Preparation and properties of MgF2 anti-reflective thin film by sol-gel process

1.
State Key Laboratory of Coal Conversion,Institute of Coal Chemistry,Chinese Academy of Sciences,Taiyuan 030001,China;
2.
Graduate University of Chinese Academy of Sciences,Beijing 100049,China;
3.
Research Center of Laser Fusion,CAEP,P.O.Box 919-988,Mianyang 621900,China

摘要

摘要: 采用溶胶-凝胶法，以醋酸镁和氟化氢为原料，以甲醇为溶剂制备了MgF2溶胶，利用浸渍提拉法在洁净石英基片上镀膜，考察了反应温度对溶胶微结构、薄膜结构和性能的影响。样品采用激光动态光散射、透射电镜、X射线粉体衍射仪、紫外-可见光谱仪、原子力显微镜进行表征。结果表明：通过该方法制备的表面平整的低折射率MgF2薄膜，在紫外区具有很好的增透性能，同时在紫外波长355 nm激光的辐照下（脉宽6 ns），薄膜具有较高的抗激光损伤性能，激光损伤阈值达10.85 J·cm-2。
- 溶胶-凝胶法 /
- 增透膜 /
- MgF2 /
- 激光损伤
Abstract: MgF2 anti-reflective thin films were successfully prepared in methanol media via sol-gel process using magnesium acetate and hydrofluoric acid as reactants. The influence of processing temperature on MgF2 sols was investigated. As-synthesized MgF2 sol was used to deposit AR films on quartz substrate, which could be applied for 355 nm UV laser. The results showed that MgF2 thin films had low refractive index, small surface roughness and good anti-reflective property in the UV region and high laser-induced damage threshold (LIDT) at 355 nm (6 ns pulses). The refractive index at 355 nm wavelength of film decreased with the increase of processing temperature. The transmittance and LIDT of quartz substrate with double-side MgF2 films both reached the maximum value, that is, 99.4% for transmitta
- sol-gel /
- anti-reflective film /
- mgf2 /
- laser damage