三点式氧碘化学激光器光腔准直技术
Three-point collimation technology of COIL resonator
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摘要: 提出三点式动态准直法,并以此设计具有自动校准功能的光腔自准直系统,提高了氧碘化学激光器的光束质量。该系统采用位置传感器作为光束位置检测元件,压电陶瓷作为动态调整元件,建立三输入三输出的耦合模型,利用多变量自适应闭环解耦控制法,实现准直系统的高速动态调整,实现了光腔准直,提高了光束质量。经初步实验验证,该系统准直范围可达4 mrad,精度为5 mrad,响应频率达20 Hz,满足氧碘化学激光器对光腔准直系统的要求。Abstract: To improve the performance of chemical oxygen-iodine laser(COIL) beam, a three-point dynamic collimation method is proposed, and a resonator auto-alignment system with auto-adjusting function is designed. The system uses position sensitive device(PSD) as the position detecting element, three groups of PZT as the driving element. The coupling model of the system is presented. Multivariable self-adaptation closed-loop decoupling arithmetic is used to design a three-input-three-output decoupling controller, resulting in high precision dynamic alignment and high qualily light beam. Experiments indicate that the collimating range of the system is 4 mrad, the precision is 5 mrad and the frequency response is 20 Hz, which meet the demand of resonator alignment system for COILs.
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Key words:
- coil /
- three-point dynamic collimation method /
- auto-adjusting /
- decoupling control
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