聚苯乙烯薄膜对自支撑锆薄膜的性能改善
Improving properties of free-standing Zr filter with polystyrene film
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摘要: 利用直流磁控溅射方法和提拉法制备了自支撑Zr/C8H8复合滤光膜和C8H8滤光膜。用同步辐射光源测量了滤光膜对软X射线的透射率，用俄歇电子能谱分析了膜中的元素含量。结果表明，虽然C8H8薄膜的加入在一定程度上降低了Zr滤光膜在软X射线波段的透射率，但较好地阻止了存储和使用过程中氧、氮等杂质对Zr金属膜的入侵，有效地改善了滤光膜的环境稳定性；同时很好地改善了Zr滤光膜的力学性能和表面面形，使制备的成品率提高了20%。Abstract: Zr/C8H8 composite filters were made by free-standing Zr filters of DC magnetron sputtering covered by polystyrene (C8H8) films prepared with Dip master 200. Soft X-ray spectral transmittance of the filters was measured in the National Synchrotron Radiation Laboratory. Results indicate that C8H8 film improves the mechanical characteristics of Zr filter and increases fabrication yield by 20%. Furthermore, C8H8 film can efficiently prevent impurities and improve environmental stability of filters.
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Key words:
- polystyrene /
- x-ray laser /
- filters /
- transmittance
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