Abstract: Based on the CAS-LIBB facility, the first single ion microbeam of China, this paper discusses the technology and characteristics of two typical single ion microbeam facilities. One is the collimation type which is simpler in structure but lower in precision. The other is electrostatic lens type that is rigorous but with high positioning precision of submicron, which leads the future of single ion microbeam(SIM). Three detection types, front detection, complete front detection and back detection, are judged, and their effects on the count of radiating ions and the beam quality are studied. A new detector with coupled fiber is being developed for CAS-LIBB microbeam. The fast fluorescence detection with online mode is designed. And finally, the future and the application of SIM are concisely