软X光多层镜反射率在同步辐射源上的标定
Reflectivity calibration of soft X-ray multilayer mirror in Beijing Synchrotron Radiation Facility
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摘要: 软X光多层镜反射率标定实验在北京同步辐射装置 上进行，利用BSRF-3W1B 束线及其反射率计靶室(主靶室)标定不同材料的多层镜样品的反射率。多层镜的标定采用波长扫描法，以得到样品反射率随波长变化的曲线。给出了21°-B4C/Si，21°-B4C/Mo，10°-Cr/Ti，15°- B4C/W，10°- B4C/W以及6.86°-B4C/W等6块多层镜在50～1 500 eV能段上的反射率标定曲线，并将其与理论计算结果进行比较。结果表明：标定曲线与理论曲线很好地符合。影响标定结果的总不确定度的主要因素是光子能量不确定度，其次是角度不确定度，测量不确定度的影响很小。Abstract: Beijing Synchrotron Radiation Facility(BSRF)-3W1B beam line was used to calibrate the reffectivint of some multilayer mirrors. The wavelength-scanning method is adopted to get the multilayer mirrors' reflectirity-energy curves. The reflectivity calibration curves of 21°-B4C/Si, 21°-B4C/Mo, 10°-Cr/Ti, 15°- B4C/W, 10°- B4C/W and 6.86°-B4C/W multilayer mirrors are given in the region of 50~1 500 eV. The values of experiment and calculation are compared and analyzed. The calibration curves agree well with the theoretical ones, and the uncertainty of calibration is mainly caused by photon energy uncertainty and calibrating angle uncertainty.
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Key words:
- synchrotron radiation /
- multilayer mirror /
- reflectivity /
- calibration /
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