溶胶-凝胶法制备高折射率TiO<sub>2</sub>薄膜

盛永刚; 徐耀; 张磊; 梁丽萍; 吴东; 孙予罕; 蒋晓东; 魏晓峰

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溶胶-凝胶法制备高折射率TiO₂薄膜

盛永刚^1,3,
徐耀¹,
张磊^1,2,3,
梁丽萍^1,3,
吴东¹,
孙予罕¹,
蒋晓东²,
魏晓峰²

1.
中国科学院山西煤炭化学研究所煤转化国家重点实验室, 太原 030001 ;
2.
中国工程物理研究院激光聚变研究中心, 四川绵阳 621 900;
3.
中国科学院研究生院, 北京 1 00049

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出版历程
- 刊出日期: 2008-01-15

Preparation of high refractive index TiO2 thin film via sol-gel process

1.
State Key Laboratory of Coal Conversion,Institute of Coal Chemistry,Chinese Academy of Sciences,Taiyuan 030001,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China;
3.
Graduate University of Chinese Academy of Sciences,Beijing 100049,China

摘要

摘要: 采用溶胶- 凝胶法制备了TiO2纳米晶溶胶，并以旋涂法（spin-coating）镀制了高折射率光学薄膜。借助光散射技术和透射电镜研究了溶胶的微结构。采用原子力显微镜、场发射扫描电镜、紫外-可见-近红外光谱仪、椭偏仪、漫反射吸收光谱及强激光辐照实验，对膜层的结构、光学性能及抗激光损伤性能进行了系统的表征。结果显示:纳米晶薄膜的折射率达到了1.9，而传统的溶胶-凝胶薄膜折射率只有1.6；同时纳米晶薄膜的抗激光损伤阈值与传统的溶胶-凝胶薄膜相差不大，在1 064 nm处分别为16.3 J/cm2(3 ns脉冲) 和16.6 J/cm2(3 ns脉冲);纳米晶溶胶薄膜可以在保持较高抗激光损伤阈值情况下，大幅度提高薄膜折射率。
- 溶胶-凝胶 /
- TiO2薄膜 /
- 折射率 /
- 激光损伤阈值
Abstract: A simple sol-gel method was applied to prepare high refractive index thin film used in antilaser optical area. The method composed of two steps employing a complete hydrolysis and a restrained polycondensation at low temperature. The morphology of the resulting sol was determined by dynamic light scattering(DLS) techniques and was characterized as anatase by high-resolution transmission electron microscopy(HRTEM). The thin optical films were deposited on K9 glass by a sol-gel spin-coating method. The film shows the presence of nanocrystalline anatase phase by X-ray diffraction(XRD) analysis. The film surface examined by atomic force microscopy(AFM) shows a mean square roughness of 7.5 nm. The transmission spectra of the film were measured using a UV-Vis-NIR spectrometer, and the refractive
- sol-gel /
- tio2 film /
- refractive index /
- laser induced damage threshold