沉积温度对LaF3薄膜性能的影响
Influence of deposition temperature on properties of LaF3 coating
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摘要: 在189，255，277和321 ℃的沉积温度下用热舟蒸发方法制备了LaF3薄膜。通过X射线衍射(XRD)测试了薄膜的晶体结构;采用分光光度计测量了薄膜的透射光谱，并计算得到样品的折射率、消光系数和截止波长;利用光学干涉仪测试得到了薄膜的残余应力;采用三倍频Nd:YAG脉冲激光测试了薄膜的激光损伤阈值。结果表明：随沉积温度的提高，LaF3薄膜的结晶状况明显变好，晶粒尺寸逐渐变大；膜层变得更加致密，折射率变大，然而薄膜吸收变得严重，截止波段向长波漂移，同时薄膜的残余应力也增加，内应力在薄膜的残余应力中起着决定作用；薄膜的激光损伤阈值在高温制备时相对较高。Abstract: LaF3 single-layer coatings were prepared by thermal boat evaporation at the deposition temperatures of 189, 255, 277 and 321 ℃ respectively. The crystal structures of the coatings were characterized by X-ray diffraction(XRD). A spectrophotometer was employed to measure its transmittance. Moreover, refractive index, extinction coefficient and cut-off wavelength were obtained from the measured transmittance spectral curve. The residual stress was evaluated by the Stoney’s equation and optical interferometer. Laser induce damage threshold(LIDT) was performed by a tripled Nd: YAG laser system. The results show that the crystallization status becomes better with the deposition temperature increasing. Correspondingly, the grain size also gets larger. Meanwhile, the coatings become more compact
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