熔石英亚表面划痕激光诱导损伤阈值实验研究
Experiment of laser induced damage threshold for different sub-surface cracks on fused silica
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摘要: 用原子力显微镜和光学显微镜观测酸蚀后熔石英亚表面划痕，并根据形貌特征将其分为Boussinesq-point-force crack(BPFC)、Hertzian-conical scratch(HCS)和Plastic indent(PI)三类，测试了各类划痕的损伤阈值，讨论了激光损伤机制。结果表明锐度较大的BPFC损伤阈值不超过2.0 J/cm<>2；深度小于1 μm的 HCS阈值可达2.6 J/cm2；形变较大的PI阈值至2.8 J/cm2，形变较小的PI的激光损伤阈值与无缺陷材料相当。BPFC 和深度超过1 μm的HCS是导致熔石英损伤阈值低的主要因素。Abstract: The micro sub-surface cracks of fused silica are observed by AFM and optical microscope. Due to the morphology characters, the cracks are sorted into three types: Boussinesq-point-force crack(BPFC), Hertzian-conical scratch(HCS) and plastic indent(PI). The laser induced damage thresholds of the cracks are measured. The damage mechanism is also discussed. The results show that the damage threshold of sharp tip BPFC is less than 2.0 J/cm2, that of HCS get to 2.6 J/cm2, and that of PI with large shape change is 2.8 J/cm2. The laser induced damage threshold of PI with small change is parallel with that of perfect surface. It is obvious that BPFC and HCS with depth more than 1 μm are the main factors to decrease the laser induced damage threshold of fused silica.
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Key words:
- yag laser /
- fused silica /
- sub-surface cracks /
- damage threshold
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