1 064, 532和680 nm波长的反射-吸收复合型防护膜的研制
Reflective and absorptive anti-laser film for 1 064 nm, 532 nm, and 680 nm wavelengths
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摘要: 针对1 064, 532 和 680 nm波长激光, 以聚碳酸酯 (PC) 为镀膜基底, 钕玻璃激光中心波长为1 064 nm, 采用六分之一加三分之一膜系的反射膜系设计,以氧化锆为高折射率膜层材料,氯化酞菁铝掺杂的氧化硅为低折射率膜层材料,通过溶胶-凝胶法镀21层膜,并在多层反射膜与PC基底之间插入张力匹配层,实现了钕玻璃激光器1 064 nm主频和532 nm二倍频波长激光的反射,以及680 nm波长红宝石激光的同时吸收,1 064,532和680 nm波长处的透射率分别为1.67%,18.24%和2.4%。Abstract: With ZrO2 and AlCl2Pc/SiO2 as high and low refractive index materials respectively, the high reflective film of 21 layers was deposited on well-cleaned polycarbonate substrate via sol-gel process. The film was designed as l0/6-l0/3 typed periodic symmetric coating stacks. Reflection to 1 064 nm and 532 nm lasers was realized. At the same time, absorption to 680 nm laser was obtained. The transmissivity at 1 064 nm, 532 nm, and 680 nm were 1.67%, 18.24% and 2.4% respectively. With this method, anti-laser protection was easily acquired at these three laser wavelengths.
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Key words:
- anti-laser protection /
- reflective film /
- silica /
- zirconia /
- phthalocyanine
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