采用发射光谱和朗缪尔探针诊断低温低压氢等离子体
Diagnosis of hydrogen plasmas at low temperature and low pressure by spectroscopy and Langmuir probe
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摘要: 使用发射光谱诊断法和Langmuir探针诊断法，测量了螺旋波激发等离子体化学气相沉积装置中产生的氢等离子体的发射光谱和电流-电压曲线。运用日冕模型和Druyvestey方法，对不同放电参数条件下激发态氢原子密度﹑等离子体密度及电子能量分布的变化规律进行了研究。结果表明：激发态氢原子密度随射频功率增大而增大，随工作气压的增大先增大，后缓慢下降。等离子体密度随射频功率增大线性增大，随工作气压的增加也是先增大，出现峰值后缓慢下降。电子平均能量随射频功率的变化是先增大，后达到平衡;随着工作气压的增大逐渐减小。两种诊断方法得到的结果基本相符。在低温低压等离子诊断中，两种诊断方法结合使用，可以得到更准确和更多的等离子体信息。
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关键词:
- 等离子体诊断 /
- 螺旋波等离子体化学气相沉积 /
- 发射光谱 /
- Langmuir探针 /
- 日冕模型 /
- Druyvestey方法
Abstract: The emission spectroscopy and I-V characteristics of hydrogen plasmas excited in helicon-wave plasma chemical vapor deposition(HWP-CVD) device have been measured by emission spectroscopy method and Langmuir probe. The density of the excited hydrogen atoms, plasma density and electron energy distribution function(EEDF) were analyzed by corona model and Druyvestey method. The results indicate that the density of the excited hydrogen atoms increases with the increase of input power while decreases with the increase of pressure. The plasma density increase linearly with the increase of input power and reaches 1012 cm-3. The plasma density increases to a peak value and then decreases with the increase of pressure. The electron average energy increases gradually then gets saturated with the inc-
Key words:
- plasma diagnosis /
- hwp-cvd /
- emission spectroscopy /
- langmuir probe /
- corona model /
- druyvestey method
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