光学波段量子点阵衍射光栅的衍射特性

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Diffraction properties of quantum-dot-array diffraction grating for visible light

1.
National Key Laboratory of Plasma Physics,Research Center of Laser Fusion ,CAEP,P.O.Box 919-986,Mianyang 621900,China;
2.
Key Laboratory of Nano Fabrication and Novel Devices Integrated Technology,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

摘要: 概述了量子点阵衍射光栅的原理及制作方法，并设计标定实验，研究了不同角度及不同波长入射情况下量子点阵光栅的衍射特性。研究结果表明：量子点阵光栅不存在高级衍射，只保留了±1级和0级衍射，具有理想的单级衍射模式。光学波段量子点阵衍射光栅的成功研制为研制紫外、X光波段具有单级衍射特征的光栅提供了契机。
- 衍射光栅 /
- 量子点阵光栅 /
- 衍射特性 /
- 标定
Abstract: Development of quantum-dot-array diffraction grating (QDADG)with single order diffraction properties is important for laser fusion research. The diffraction principle and fabrication method are introduced in this article. Diffraction properties of quantum-dot-array diffraction grating are studied when visible light radiates grating with different wavelength and incidence angle. It shows that QDADG can get rid of the influence of high order diffraction, which will solve the key problem (i.e. distortion from high order diffraction) of the present diffraction grating spectroscopy. QDADG for visible light is a potential alternative for X-ray, extreme ultraviolet and microwave diagnoses．
- diffraction grating /
- quantum-dot-array diffraction grating /
- diffraction properties /
- characterization

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