高频H型放电离子源的场特性
Characteristics of RF ion source electromagnetic field
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摘要: 从Maxwell方程组出发，推导了高频H型放电离子源放电空间的场分布, 并采用Mafia软件进行了三维实体建模，计算了高频离子源放电击穿前和稳定工作后的电磁场分布，得到了高频离子源放电空间电磁场分布的直观图像。通过比较击穿前高频电场的轴向和环向分量，得出了轴向电场在高频离子源击穿中起主要作用的结论，并进而推导出了高频离子源的击穿判据，得出了气体击穿时离子源击穿电压和放电管内气压的关系，与实验结果符合较好。Abstract: Distribution of electromagnetic field in the space of Htype RF ion source is researched theoretically. Threedimensional vector graphs of electric field intensity and magnetic induction density in the space of RF ion source are calculated and plotted by Mafia software. The conclusion that axial electric field intensity is more important during the breakdown of RF ion source is made out by comparing it and azimuthal electric field intensity before breakdown, and then, the breakdown criterion of RF ion source is calculated, which is reasonably in agreement with experimental data.
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Key words:
- rf ion source /
- criterion of breakdown /
- field distribution
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