衬底温度对类金刚石薄膜力学性能的影响
Effect of substrate temperature on mechanical properties of diamond-like carbon films
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摘要: 采用脉冲激光沉积方法在不同衬底温度下制备了最高硬度与弹性模量分别达45 GPa和290 GPa，且表面十分光滑的类金刚石薄膜。在相对湿度为80%的条件下，薄膜最低的摩擦系数与磨损率分别为0.045与5.74×10-10 mm3·N-1·m-1。实验结果表明,硬度与弹性模量随衬底温度升高而降低，摩擦系数与磨损率随衬底温度升高而增大。拉曼光谱表明:在室温下制备的薄膜为典型类金刚石结构，sp3含量高达76.8%，而随温度升高，薄膜结构逐渐经无定形碳结构向纳米晶石墨结构方向发展，sp3含量也随之降低，力学性能变差。Abstract: Smooth diamond-like carbon films are fabricated by pulsed laser deposition at different substrate temperature. DLC films grown at room temperature exhibit excellent mechanical properties, their hardness and elastic modulus are 45 GPa and 290 GPa, and their friction coefficient and wear rate, at the condition of 80% RH, are 0.045 and 5.74×10-10 mm3·N-1·m-1 respectively. However, the hardness and modulus of films decrease with increasing the substrate temperature, at the same time, the friction coefficient and wear rate increase with the deposition temperature. Raman spectrum indicates that the carbon film grow at low temperature is typical tetrahedral diamond-like carbon film with high sp3 content (about 76.8%), and the sp3 content of the film reduces with temperature and the mechanical
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