椭偏光散射分析类金刚石薄膜的散射特性
Light scattering from diamond-like carbon films by ellipsometry
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摘要: 基于光学薄膜反射椭偏法的测量原理，对光学薄膜散射椭偏特性进行了研究。给出了光学薄膜散射逆问题的解决方法，并对不同脉冲频率下采用脉冲真空电弧离子镀技术沉积的类金刚石薄膜的散射特性进行了研究。分析了光学薄膜界面的相关特性以及膜层中局部缺陷对散射光椭偏特性的影响。结果表明:随着脉冲频率的增加，所沉积的类金刚石薄膜的相关性变差，且薄膜中的局部缺陷引起的体散射越明显。Abstract: Ellipsometry of light scattering from optical thin films are investigated based on reflection ellipsometry measurements from optical thin films. The inverse problem of light scattering from optical films is solved with this method. Diamond-like carbon(DLC) films deposited by pulse vacuum arc ion coating technology with different pulse frequency are studied. The effects of correlation and localized defects in films on scattering ellipsometry are emphasized. The results show that correlation become worse and scattering become more obvious as the pulse frequency increases in depositing DLC films.
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Key words:
- light scattering /
- ellipsometry /
- optical films /
- correlated properties /
- diamond-like carbon films
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