强流脉冲离子束辐照对电弧离子镀TiNbN硬质薄膜摩擦磨损性能的影响
Effect of high-intensity pulsed ion beam irradiation on the tribological property of arc ion-plated TiNbN hard film
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摘要: 利用分离靶电弧离子镀工艺在高速钢基体上制备TiNbN多元硬质薄膜，利用TEMP-6型强流脉冲离子束（HIPIB）设备，采用含C/H离子、加速电压300 kV、脉冲宽度70 ns、束流密度60 A/cm2的强流脉冲离子束对所制备的薄膜进行辐照处理，研究辐照前后膜层的摩擦磨损性能的变化。实验结果表明：HIPIB辐照以后，薄膜的表面熔化，摩擦系数降低，晶粒细化，膜层的硬度由HK3444提高到HK3820,膜基结合力由59 N提高到65 N。在测试载荷300 N和600 N条件下，薄膜的摩擦磨损性能均有较大改善。Abstract: The TiNbN hard film have been prepared on high-speed steel by arc ion-plating using seperate targets. The prepared film are irradiated by high-intensity pulsed ion beam(HIPIB) of mixing proton and carbon ions at accelerating voltage of 300 kV with pulse width of 70 ns, at ion current density of 60 A/cm2 on TEMP-6 type HIPIB apparatus. The friction and wear behaviors of non-irradiated and irradiated film are investigated under loads of 300 N and 600 N, respectively. The HIPIB irradiation leads to grain size reduction of the film, by which the hardness of film is enhanced from HK3444 to HK3820, and the bonding strength between film and substrate increases from 59 N to 65 N. The irradiated film has significant improvements in friction and wear characteristics．
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