基于硅微加工技术的新型变形反射镜
Novel deformable mirror based on silicon micromachining technology
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摘要: 给出了一种基于硅微加工技术的新型变形反射镜的设计和加工方法。变形反射镜镜面主体是由一定厚度的硅膜构成，硅膜上表面溅射有一层Ti/Au，背面有一7×7阵列的台柱与之相连，台柱下方是对应的驱动电极。当给电极施加电压时，产生的静电力就会拉动台柱向下运动，从而使相应的镜面部分发生变形；通过控制通电电极的位置及电压，就可获得特定的镜面形状。在变形反射镜的加工工序中采用浅腐蚀形成键合台，采用深腐蚀加工出台柱。并采用条补偿图形对台柱的凸角进行补偿，在0.2MPa气压下进行键合，最后成功研制出有效反射面积为30mm×30mm，拥有49个静电驱动单元的变形反射镜。Abstract: Based on silicon micromachining technology, a novel deformable mirror with 30mm×30mm effective reflecting surface and 49 actuators is designed and fabricated. It is composed of a silicon membrane, at the back of which is attached by a 7×7 pillars array. The pillars and bonding part are fabricated through two etching steps with different depth. In terms of optimization, a strip pattern is designed specially for the convex corner compensation during the etching process, and the anodic bonding process is performed under 0.2MPa atmospheric pressures.
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Key words:
- deformable mirror /
- bulk micromachining /
- electrostatic actuating /
- corner compensation /
- anodic bonding
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