纳米金刚石薄膜的二次电子发射特性
Secondary electron emission characteristic of nano-crystalline diamond films
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摘要: 简要介绍了微波等离子体化学气相沉积（MPCVD）方法在硅基底上制备纳米金刚石薄膜的过程，并对制备的薄膜进行了表面分析。在此基础上设计出了用来测定反射型二次电子发射系数的实验装置，得出了几种薄膜在不同入射能量下的发射系数，取得了二次发射系数为15的满意结果，表明纳米金刚石薄膜作为二次电子发射材料具有很好的应用前景。
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关键词:
- 高平均功率自由电子激光 /
- 纳米金刚石膜 /
- 微波等离子体化学气相沉积方法 /
- 二次电子发射特性
Abstract: The preparation,characterization and application of nanocrystalline diamond films have become a new “hot point” in the development of diamond films prepared by chemical vapor deposition. The preparation process of nanocrystalline diamond films with MPCVD method was introduced, as well as the result of surfaces analysis.Then an experiment device is designed to measure the Secondary electron emission coefficient(ＳＥＥＣ) in reflection mode.An expectable aim(ＳＥＥＣ is 15) has been achieved． -
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