单层膜Kirkpatrick-Baez显微镜的分辨率模型
Resolution model of Kirkpatrick-Baez microscope with single-layer films
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摘要: 分析了几何像差、衍射效应和光学加工精度等因素对不同工作能点的单层膜Kirkpatrick-Baez显微镜成像质量的影响，构建了该显微镜的均方根空间分辨率模型,用Ir单层膜KB显微镜获得了8 keV能量的X射线成像结果，其中心视场的分辨率约为2 mm，±50 mm视场的分辨率优于5 mm。实验结果与分辨率模型的对比表明，中心视场的分辨率受球差、衍射效应和反射镜加工精度的综合影响，边缘视场的分辨率主要由系统的几何像差决定。
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关键词:
- Kirkpatrick-Baez显微镜 /
- 空间分辨率 /
- 单层膜 /
- 视场
Abstract: Based on influences of geometric aberration, diffraction, figure error and surface roughness, a root-mean-square spatial resolution model of Kirkpatrick-Baez(KB) microscope with single-layer film is proposed. An 8 keV X-ray imaging experiment by KB microscope with single Ir layer is performed, and the resolution is about 2 mm in central field and better than 5 mm in ±50 mm. The calculated results from the model is in good agreement with the experiment results, and using this model, the spatial resolution related to visual field can be estimated during the systems-design phase.-
Key words:
- kirkpatrick-baez microscope /
- spatial resolution /
- single-layer films /
- visual field
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