Fe纳米颗粒嵌埋对类金刚石薄膜结构及电学性能的影响
Effects of Fe-embedding on microstructure and electrical properties of diamond like carbon films
-
摘要: 采用脉冲激光气相沉积方法制备了不同Fe嵌埋浓度的Fe: DLC多层纳米复合薄膜。用X射线光电子能谱仪(XPS)对薄膜的组成成分进行分析。利用透射电子显微镜（TEM）、拉曼光谱、电流-电压曲线研究Fe纳米颗粒嵌埋对薄膜的微观结构及电学性能的影响。XPS和TEM表明，Fe纳米颗粒周期性地均匀地嵌埋在碳薄膜中。拉曼光谱表明薄膜中的C为典型的类金刚石结构，Fe纳米颗粒促进芳香环式结构的形成，薄膜结构的有序度提高。电流电压曲线表明，Fe纳米颗粒的嵌埋导致薄膜的室温电导率增加。Abstract: Fe-embedding diamond-like carbon(Fe: DLC) films with different Fe content were deposited by using a pulsed laser deposition(PLD) technique. An X-ray photoelectron spectroscopy(XPS) was used to probe the composition of deposited Fe: DLC films. The effects of Fe-embedding on the microstructure and electrical properties of diamond-like carbon films were investigated by means of transmission electron microscopy(TEM), Raman spectroscopy and current-voltage characteristics. The XPS, TEM and Raman spectra analyses indicate that the Fe nano-particles periodically embed in the amorphous carbon matrix and their embedding promote aromatic bond formation, and accordingly, the degree of order of the films increase gradually as the Fe content increase. The current-voltage characteristics show Fe-embeddi
-
Key words:
- pulsed laser deposition /
- dlc films /
- fe-embedding /
- microstructure /
- electrical conductivity
-
点击查看大图
计量
- 文章访问数: 2177
- HTML全文浏览量: 255
- PDF下载量: 493
- 被引次数: 0
下载:
