30.4 nm Cr/Al/Cr自支撑滤光片的研制
Fabrication and characterization of 30.4 nm Cr/Al/Cr self-supporting filters
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摘要: 依据材料的质量吸收系数和波长的关系，选择Cr和Al 设计和制备30.4 nm自支撑滤光片。在制备时以NaCl为脱膜剂，以热蒸发方式蒸镀Al，以电子束蒸发方式蒸镀Cr, 制备了30.4 nm的Cr/Al/Cr自支撑滤光膜，并对滤光片的表面缺陷进行了分析。通过显微镜观察，滤光膜均匀纯净，无明显针孔。Cr/Al/Cr自支撑滤光片在合肥国家同步辐射实验室进行了测量, Cr/Al/Cr厚度为5 nm/500 nm/5 nm和12.5 nm/500 nm/12.5 nm的滤光片在30.4 nm波长处的透过率分别为7.6%和4.6%，透过率曲线和理论计算基本一致。用紫外分光光度计测量得滤光片在200～800 nm波长范围的透过率小于0.02%，满足使用要求。Abstract: Cr and Al were chosen to design the 30.4 nm self-supporting filter based on relation between mass absorption coefficient and wavelength. NaCl was chosen as parting agent, Al was deposited by thermal evaporation, Cr was deposited by electron-beam evaporation, and finally 30.4 nm Cr/Al/Cr self-supporting filters were prepared. Observed under microscope, the filter topography was clean and uniform without apparent pinholes. The Cr/Al/Cr filters were measured in th National Synchrotron Radiation Laboratory in Hefei, and the transmittances of Cr(5 nm)/Al(500 nm)/Cr (5 nm) filter and Cr(12.5 nm)/Al(500 nm)/Cr(12.5 nm) filter are 7.6% and 4.6% at the wavelength of 30.4 nm, respectively. The measured transmittance curves of the two filters in EUV region are in general accordance with the predictio
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Key words:
- filter /
- mass absorption coefficient /
- self-supporting /
- transmittance /
- defect
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