Abstract: A KBA X-ray microscope is a non-coaxial grazing incident X-ray imaging system, whose solid angle is small and image quality requirement is high. It requires strict installation of four reflective mirrors. The conventional position or angle measurements, under the space confinement of the ICF target chamber, can not attain enough precision. In order to ensure the image quality, we use a 4″ precision goniometer to control the error of the angle between the bimirror less than 20″. The grazing incident angle has much effect on the imaging quality, therefore, in order to ensure a precision smaller than 10″, we have used our own optical path system. The principal mirror aperture angle of the KBA X-ray microscope is 4×10－6 sr, which can not achieve sharp focusing, thus an auxiliar