采用分步迭代算法设计制作衍射光学元件
Design of diffractive optical elements by step iterative algorithm
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摘要: 结合均匀照明相位器件的设计实例，介绍最新提出的基于迭代框架的优化方法，并应用该方法设计制作了16台阶的衍射光学元件并对其进行了测试，验证了设计原理及方法的正确性，且对加工中可能出现的误差进行了分析和讨论。测试结果验证了采用多台阶相位结构的设计方案能有效提高工艺宽容度。Abstract: A new method was used to design diffractive optical elements (DOE) based on improved iterative algorithm. This method shortened the computing time tremendously and the aberration factor of the design was about 8.4%. A DOE with 16 steps construction and quantized phase was fabricated with ion beam moving etching technology. Test results showed that the aberration factor was about 19% which proved the feasibility of the algorithm. The machining error in DOE was analyzed.
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