正入射软X-射线显微成像系统聚光镜设计
DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS
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摘要: 依据正入射软X 射线显微成像系统对聚光镜的要求, 论述了采用掠入射聚光镜是最佳选择。在分析聚光镜几何参数的基础上, 决定了确定椭球面聚光镜的方法。在考虑材料反射特性和实际制作椭球面镜方法的同时, 确定了要研制的高分辨率显微成像系统用聚光镜的结构参数。Abstract: The optimum choice of grazing incidence on the basis of the demands soft X ray normal incidence microscopic optics is presented. The methods determined the elliptical condenser was carried out according to analyzing the geometric parameters of condenser. The structure of the condenser for soft X ray normal incidence microscopic optics was completed considering the reflective performance of materials and the techniques of the condenser.
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Key words:
- soft x-ray /
- microscopic optics /
- condenser /
- grazing incidence
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