TEA CO2激光器预电离结构电极系统的电场研究
Field uniformity of electrode system with preionization structure for TEA CO2 laser
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摘要: 高功率气体激光器的非对称复杂电极系统中，电极参数的变化以及预电离结构的引入将会使所设计的均匀电场发生具体的改变。采用高精度有限元方法，对这类复杂电极系统进行建模并且计算其电场分布，根据分析结果更合理地指导激光器设计。对一种典型的非对称复杂电极系统TEA CO2激光器，应用该方法并结合了预电离过程，研究了引入预电离器导体和变化电极形状对电极表面的电场强度起伏和放电空间的均匀电场面积产生的影响。结果表明:通过这种预先模拟,合理选择电极构型参数和预电离结构安装位置，可以产生性质较好的均匀电场以及效率较高的激光输出。
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关键词:
- TEA CO2激光器 /
- 气体放电 /
- 印刷电路板预电离 /
- 均匀场电极 /
- 电场计算
Abstract: The differences of electric field distribution produced by the variation of parameters in an asymmetric multielectrode system for high power gas lasers are studied. With the highprecision finite element method, the model of such complicated electrodes system is presented, and its electric field is calculated numerically. For a typical TEA CO2 laser with asymmetric electrodes and printed circuit board preionization structure, this method is applied to analyze electric field uniformity and uniform field range. The results suggest that a better distribution of electric field can be obtained by optimizing of structure parameters based on simulation, and lower cost for the electrodes configuration can be achieved at the same time. Stable operation at 200 Hz with an average output of 7 J per -
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