基于辅助光学系统的KB显微镜瞄准方法
Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system
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摘要: 研究了利用辅助可见光系统精确瞄准KB显微镜物点的方法。设计了工作能点8 keV的周期多层膜KB显微镜系统，通过光线追迹和X射线成像实验，得到5 μm空间分辨率所对应的视场和景深，进而计算出诊断实验对应的指向和景深要求。基于KB系统的物像关系和精度要求，设计了辅助的可见光成像系统，实现了可见光系统与X射线KB系统间的等效瞄准，利用耦合好的系统进行了瞄准和X射线成像实验。实验结果表明:辅助光路可以实现±20 μm的垂轴面和±300 μm的轴向定位精度，满足KB显微镜的瞄准要求。Abstract: An auxiliary optical system has been designed, which can provide precise positioning for aiming Kirkpatrick-Baez(KB) microscope object location. An 8 keV X-ray imaging system by KB microscope with periodic multilayer films has been designed. The field of view and depth of field in the resolution of 5 μm are got, and then the corresponding point and depth of field in diagnostic experiments are calculated. Based on the object-image relations and precision of the KB microscope, an auxiliary visible light imaging system is designed and X-ray imaging experiments are performed, which can achieve equivalent aiming between the visible imaging system and the KB microscope. The results show that ±20 μm vertical axis plane and ±300 μm axial accuracy are achieved through the auxiliary optical pat
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Key words:
- kirkpatrick-baez microscope /
- auxiliary optical system /
- aiming /
- depth of field
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