TEA CO2激光器非对称电极系统的电场分布
Electric field of asymmetric electrodes for TEA CO2 laser
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摘要: 设计了一种非对称电极，这种非对称电极的阳极是Chang电极或Ernst电极，阴极是由直线和圆弧构成的简单电极。通过比较和分析非对称电极和对称电极的特点发现,非对称电极系统中简单电极的边缘电场起伏最大。采用有限元方法计算了非对称电极系统中的简单电极取不同的直线长度和弧线半径时，非对称电极系统的电场分布，给出了选择非对称电极系统中的简单电极参数的依据。结果表明：这种非对称电极系统结合了解析电极和简单电极的优点，通过选择非对称电极系统的简单电极参数，它可以在TEA CO2激光器中产生边缘电场起伏小于0.06，且满足电极表面均匀场面积宽度要求的电场。
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关键词:
- TEA CO2激光器 /
- 均匀场电极 /
- 非对称电极 /
- 电场计算 /
- 解析对称
Abstract: Features of a practical asymmetric electrode system were studied. The anode of this system is an analytical electrode such as Chang electrode and Ernst electrode, and the cathode is a simple electrode with line-arc structure. The electric field of the system was calculated with high-precision finite element method(FEM), and was analysed and compared with that of two symmetric electrode systems. With the analysis of effects of the parameters used in construction of the asymmetric electrodes, some suggestions were made for optimal choice of the shape of simple electrodes. The results show that the asymmetric electrodes are suitable for TEA CO2 lasers, and uniform electric field with required size can be obtained by proper choices of electrode parameters. -
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