衍折射设计用于均匀照明的衍射光学器件
Diffractive-refractive method for design of diffractive optical elements for uniform illumination
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摘要: 在工艺上衍射光学元件是通过相位板来实现的，由于其多台阶化产生的不连续性，会对目标光场产生sinc调制，产生高级次衍射斑，损失了15%或者更多能量。通过对设计衍射光学器件的传统的IO迭代算法进行了研究，提出了一种与衍折射相结合的设计方法，在衍射光学器件的部分区域形成一块连续相位区域，减少了相位片台阶化区域的光强和衍射斑的强度。通过逐步变化连续相位对输出光强情况的影响的研究，可以优化相位参数,使入射到输出面的光束保证一定匀滑性的前提下，提高目标光场区域的衍射效率达到90%以上，能够满足均匀照明的要求。Abstract: The diffractive optical element is one of the main solutions to achieve uniform illumination, which is achieved through the pure phase element. There are sub-diffraction spots because of the discontinuity of pure phase element, which makes the beam lose 15% or more energy. Thus a diffractive-refractive method based on the traditional input-output algorithm is developed to design the diffractive optical element. This method makes part of a diffractive optical element continuous in phase, which reduces the light intensity in the discontinuous region of the element, therefore reduces the intensity of sub-diffraction spots. Through studying the influence of spherical phase factor on output light intensity, the phase parameter can be optimized to increase the diffraction efficiency of the incid
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