酸碱分步催化对溶胶-凝胶ZrO2膜光学性能的影响
Optical characterization of sol-gel ZrO2 coatings with acid alkali two-step method
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摘要: 以丙醇锆作为前驱体，利用酸碱分步催化法制备了ZrO2溶胶，用粒度仪检测胶体粒度；用N2吸脱附表征凝胶的结构；采用旋转镀膜法在K9基片上镀制单层ZrO2薄膜；用分光光度计和椭偏仪检测膜层的透过率、折射率及膜层厚度；用红外光谱仪检测胶体内部粒子间化学键状态。实验结果发现,在脉宽1 nm，波长1 064 nm时，采用此种胶体镀制的单层ZrO2膜层折射率达到1.74，单层膜损伤阈值为9.0 J/cm2,表明该方法集中了酸与碱两种催化方式的优点，一定程度上提高了膜层的光学性能。Abstract: A synthesis procedure of ZrO2 colloids derived from the acid-alkali two-step catalyzed hydrolysis was disclosed. The granularity and its distribution of the colloid particles were measured.Then a ZrO2 film was prepared by the spin-coating method on K9 glass. Physical properties of the thin film were characterized by ellipsometer, UV-Vis spectrophotometer, and Fourier transform infrared spectrometer. The refractive index of the coating with the two-step method was 1.74, and the laser damage threshold was 9.0 J/cm2 at 1 064 nm fundametal wavelength and 1 ns pulse duration.The measured and experimental results indicate that the two-step method have advantages over single step ones.
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Key words:
- sol-gel /
- zirconium oxide /
- catalyzer /
- refractive index /
- colloid particle
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