周期多层膜Kirkpatrick-Baez显微镜成像性质分析
Imaging characteristic analysis of Kirkpatrick-Baezmicroscope with periodic multilayer
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摘要: 分析了Kirkpatrick-Baez（KB）显微镜的成像性质与周期多层膜元件间的关系。基于分辨力和集光效率要求，设计了KB显微镜的光学结构，模拟了KB系统的成像质量，用W/B4C周期多层膜反射镜进行了X射线成像实验，在±100 μm视场内得到优于5 μm的空间分辨力结果。实验与模拟结果的对比表明，加工精度和球差是影响中心视场分辨力的关键因素，有效视场的大小受多层膜角度带宽的限制。
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关键词:
- Kirkpatrick-Baez显微镜 /
- X射线成像 /
- 周期多层膜 /
- 像质
Abstract: Relation between imaging characteristic of Kirkpatrick-Baez(KB) microscope and periodic multilayer films is analyzed. The optical structure of KB microscope is designed based on resolution and collection efficiency requirements. Imaging quality is simulated, and 8 keV X-ray imaging experiment by KB microscope with W/B4C periodic multilayer is performed, the resolution is about 2 μm in central field and better than 5 μm in ±100 μm field. The result comparison between simulation and experiment shows spherical aberration and mirror machining precision are the key factors influencing the resolution of central field, and the range of effective field of view is limited by angle bandwidth of periodic multilayer. -
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