不同工艺制备的高反射薄膜在真空与大气环境下的激光损伤特性
Laser induced damage of high reflective coatings prepared by different deposition methods in vacuum and air
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摘要: 建立了光学元件在真空环境下的激光损伤测量系统,采用电子束蒸发和离子辅助技术制备了Hf2/SiO2高反射薄膜。对不同工艺制备的薄膜在真空与大气环境下的1 064 nm波长的激光损伤阈值进行了测量,对薄膜的损伤形貌进行了观测。对薄膜的损伤特性研究分析结果表明:薄膜在真空环境中的损伤阈值相对大气环境中有明显下降,其1∶1测试和R1测试损伤阈值下降约30%;两种环境中的薄膜损伤特性也不同,真空环境中损伤阈值的下降可能与热传导的不同有关。Abstract: The vacuum laser damage experimental facility was established. The samples of Hf22/SiO2 high reflective coatings were prepared by electron beam evaporation and ion assisted technology. The laser induced damage thresholds(LIDT) of samples were determined.The damage behaviors of the samples in vacuum and air environment were different. The results showe that the 1∶1 and R∶1 LIDTs of coatings in vacuum decreased about 30% compared with those inair, which might be caused by different thermal diffusion processes.
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Key words:
- film optics /
- laser induced damage /
- vacuum /
- air /
- high reflective coatings
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