静电排斥型微机电系统变形镜驱动器
Microelectromechanical systems deformable mirror actuator based on electrostatic repulsive force
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摘要: 为了克服常规静电微机械驱动器所存在的静电吸合现象，基于非均匀分布的静电场可以产生排斥力的原理，设计了一种新型的微机电系统变形镜驱动器。驱动器由5组电极构成，最大的一组由中心质量块和位于正下方的下电极组成，其它4组分别位于各条边上。中心质量块由4根L形弹簧支撑，每根弹簧分别固定于驱动器的4个锚点。利用有限元软件对驱动器的频率响应和暂态响应特性进行了仿真，结果表明，谐振频率高达4 kHz，暂态响应时间小于0.05 s。利用表面硅工艺加工出了驱动器，并利用白光扫描干涉仪对驱动器的静态位移电压特性进行了测试，测得驱动器在70 V激励电压下的形变量为1.4 μm。Abstract: A novel microelectromechanical systems (MEMS) deformable mirror actuator based on electrostatic repulsive force is presented. The design is based on the principle that asymmetric electric field can generate repulsive force. The actuator can eliminate the pull-in effect which limits the reliability of the conventional electrostatic MEMS deformable mirrors. The actuator consists of five pairs of electrodes, the largest of which is composed of a central mass and a bottom electrode right below it, and the other four of which are positioned on each side of the actuator. The central mass is supported by four L-shaped springs which respectively connecting four anchors on the corners. The resonant frequency and transient response time are simulated by finite element analysis, and they are 4 kHz an
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