基于改进Stoilov算法光学元件瑕疵检测
Optical element defect detection based on improved Stoilov algorithm
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摘要: 提出一种基于统计逼近的改进Stoilov算法，可以除去光学元件检测中展开相位时遇到的奇异点和超大误差，提高测量精度。通过重构瑕疵表面3维形貌，并对规则几何形状光学元件表面进行拟合，建立光学元件瑕疵检测理论模型，可以有效对光学元件表面瑕疵进行检测。把该算法和模型运用到光学平晶瑕疵检测中，测出光学平晶的微小划痕深度为40 nm。Abstract: An improved Stoilov algorithm was proposed based on statistical approach, which can remove singularities and large errors to improve measure precision. The optical element defect detection model was constructed by fitting the surface of optical element as well as reconstructing the surface of defect element. The defect on an optical flat was detected with this method and model. The measured depth of scratch is 40 nm.
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