Abstract: The uncertainty in delay and jitter measurement has been evaluated for the laser-triggered switch in the Z-pinch primary test stand (PTS) prototype module. The delay is defined as the time difference between the 10% amplitude points in rise edges of laser signal and dI/dt of the switch. A line can be fitted from the rise edge of the dI/dt waveform, whose slope determines the influence of amplitude measurement’s uncertainty on delay measurement's uncertainty. Thus the frequency response uncertainty of the measure system is included in the linear function, and the math model of delay uncertainty is founded from the linear function modified with the uncertainty from the time resolution of the digital oscillograph. The model of jitter uncertainty is founded from the definition of jitter, and