基于驻留时间补偿的抛光误差控制方法
Control method of polishing errors by dwell time compensation
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摘要: 针对计算机控制光学表面成形中光学表面存在中高频误差的问题，提出了一种基于驻留时间补偿的有效控制方法。分析了抛光误差的形成机理和影响因素，对系统的误差影响因素进行分类和定量描述，构建了抛光过程中磨损影响因子、浓度变化影响因子和系统影响因子。基于各影响因素的影响因子对抛光驻留时间的求解函数进行了修正，提出采用离散最小二乘法对修正的函数求解驻留时间。研究表明：这种补偿方法能提高计算机控制光学表面成形技术中加工模型的精度，减小光学表面的残余误差。Abstract: A method for controlling the spatial-frequency errors in computer controlled optical surfacing process (CCOS) is brought forward. The mechanism of middle and high spatial-frequency errors in polishing is studied, error factors are assorted, and the wear function of polishing tool, concentration changing function of slurry and system revised function are established. Then the Preston function is modified, and a dwell function algorithm is established based on the discrete last-squares method. The application shows that, the method can reduce residual errors on optical surface, and thus improve the CCOS precision.
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