光束畸变对连续相位板性能的影响
Impact of beam aberration on continuous phase plates performance
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摘要: 研究了光线追迹和随机相位滤波作为初始相位设计的连续相位板下，光束畸变对连续相位板整形性能的影响。结果表明：随机相位滤波得到的连续相位板相比光线追迹获得的连续相位板，在幅度畸变、离焦的容忍度等方面都有优越性;进一步分析了相位畸变、对准误差、口径误差等对连续相位板性能的影响，确定了相位畸变是影响性能的首要因素，并且大目标焦斑的畸变宽容度更大，由此引入了波前的相对畸变因子，在所定义的连续相位板性能标准下，波前容忍度为0.5。Abstract: Ray trace and filtered random phase can be used as initial phase to design continuous phase plates (CPPs).The performance of the CPPs designed with the two ways was studied. The results show that the CPP with filtered random phase as initial phase has better defocusing and amplitude aberration tolerance compared with that with ray trace as initial phase. What’s more, wavefront aberration is the primary factor affecting the CPP’s performance and the tolerance to it is related with focal spot size. Thus relative phase aberration factor was introduced to quantify wavefront aberration and focal spot size and with the defined CPP performance standard the tolerance was 0.5 aberration factor.
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Key words:
- continuous phase plates /
- initial phase /
- beam aberration /
- focal spot shaping
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