掺氟SiO2增透膜真空环境抗污染能力
Contamination-resistant capability of sol-gel fluorin-doped SiO2 antireflective coating in vaccum
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摘要: 以正硅酸乙酯为前驱体，采用氨水为催化剂配制SiO2溶胶，在胶体陈化过程中掺入十二氟庚基丙基三甲氧基硅烷对胶体进行改性，并采用溶胶凝胶法在K9基片上制备了改性的二氧化硅增透膜，用红外光谱仪、分光光度计、原子力显微镜、椭偏仪、静滴接触角测量仪、N2吸附-脱附对膜层性质进行了分析。结果表明：掺氟的二氧化硅膜层增透膜峰值透光率为99.7%；与水的接触角为129°；与二甲基硅油的接触角达到86°；膜层真空抗污染能力比掺氟前大大提高。Abstract: Using tetraethoxylsilane as precursor and ammonia as catalyst, the fluoroalkylsilane was doped when the silica sol was growing, and the fluorin-doped silica antireflective coating was prepared by sol-gel process on K9 substrate. The properties of the coatings with and without fluorin were characterized with infared spectrometer, spectrophotometer, atomic force microscope, ellipsometer, contact angle measurement and N2-adsorption/desorption analysis. The results indicate that the peak transmittance of the fluorin-doped coating is 99.7%, and its water contact angle and polydimethyl siloxane oil contact angle are 129° and 86°, respectively. The contamination-resistant capability of the fluorin-doped antireflective coating is much better than the common one．
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Key words:
- sol-gel /
- doping /
- silica /
- antireflective coating /
- contamination resistant capability
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